Harmonic Arm

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Repair Information

Your Harmonic Arm will be thoroughly rebuilt, properly calibrated,
and then tested for reliability and performance.

All bearings are replaced with the proper OEM specified part numbers. Next, both stepper motors and belts are replaced, as well as all 5 of the positioning sensors.

The Harmonic Arm Drive is then rigorously tested and verified for the equivalent of processing 500 wafers without losing a step.

This not only verifies proper operation, but provides consistent wafer placement throughout the lot(s) before the tool has to re-initialize.

We proudly back our work up with one of the best in-use warranties in the industry for peace of mind on your investment. Contact us below for more information.

Applicable Part Numbers

Get Your Harmonic Arm Repaired Now!

Are downtime and scrap getting costly,
and hindering your productivity?

Contact us today, and we’ll get you back up and running ASAP!

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